Hexachlorodisilane as a Precursor in the LPCVD of Silicon Dioxide and Silicon Oxynitride FilmsR.C. TaylorB.A. Scott2019JES
Selective Wet and Dry Etching of Hydrogenated Amorphous Silicon and Related MaterialsI. HallerY.H. Leeet al.2019JES
Photoinitiated Cross-Linking and Image Formation in Thin Polymer Films Containing a Transition Metal CompoundC. Grant Willson2019JES