Airborne chemical contamination of a chemically amplified resist
- Scott A. MacDonald
- N.J. Clecak
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- 1991
- Microlithography 1991
Conference paper
Publications
14468 results for Physical Sciences
Carbon incorporation in metalorganic vapor phase epitaxy grown GaAs using CHyX4 - y, TMG and AsH3
- N.I. Buchan
- T.F. Kuech
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- 1991
- Journal of Crystal Growth
PaperTbFeCoCr magneto-optical media with high corrosion resistance
- S. Takayama
- T. Kawanabe
- et al.
- 1991
- Journal of Magnetism and Magnetic Materials
PaperParticipation of carbon in the electronic structure of YBa2Cu3O7
- P.E. Batson
- T.M. Shaw
- et al.
- 1991
- Physical Review B
PaperProbing depth of the low energy cascade electrons from a transition metal
- M. Donath
- D. Scholl
- et al.
- 1991
- Applied Physics A Solids and Surfaces
PaperCollimated magnetron sputter deposition
- S.M. Rossnagel
- D.J. Mikalsen
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperD-wave, dimer, and chiral states in the two-dimensional Hubbard model
- Alberto Parola
- Sandro Sorella
- et al.
- 1991
- Physical Review B
PaperStructural and electronic properties induced by hydrogen adsorption on the GaAs(100) surface
- A.F Wright
- C.Y Fong
- et al.
- 1991
- Surface Science
PaperFluorescence of poly(di-n-alkylsilane)s in room-temperature solution
- Ya-Ping Sun
- Robert D. Miller
- et al.
- 1991
- Journal of Inorganic and Organometallic Polymers
PaperThickness dependence of the irreversibility line in YBa2Cu3O7-x thin films
- L. Civale
- T. Worthington
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- 1991
- Physical Review B
Paper