Localized degradation studies of ultrathin gate oxides
- H.J. Wen
- R. Ludeke
- 1998
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
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Developments in equipment support technology
- J.J. Sullivan
- R. Gwizdak
- et al.
- 1998
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Effects of argon addition to a platinum dry etch process
- K.R. Milkove
- J. Coffin
- et al.
- 1998
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Copper diffusion in amorphous germanium
- J. Doyle
- A.Yu. Kuznetsov
- et al.
- 1998
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Atomic step distributions on annealed periodic Si(001) gratings
- S. Tanaka
- C.C. Limbach
- et al.
- 1997
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Electronic structure and electron emission of lithium-containing amorphous hydrogenated carbon films
- J.-U. Thiele
- P. Kania
- et al.
- 1997
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Femtosecond time-resolved photoemission of electron dynamics in surface Rydberg states
- T. Hertel
- E. Knoesel
- et al.
- 1997
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Characterization of a solid fluorocarbon film on magnetic recording media
- Tom Karis
- George W. Tyndall
- et al.
- 1997
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Insight into the dry etching of fence-free patterned platinum structures
- K.R. Milkove
- C.X. Wang
- 1997
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Image force effects and the dielectric response of SiO2 in electron transport across metal-oxide-semiconductor structures
- H.J. Wen
- R. Ludeke
- et al.
- 1997
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films