Langmuir probe measurements of a radio frequency induction plasma
- J. Hopwood
- C.R. Guarnieri
- et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Publications
358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Selective reactive ion etching of phosphorus-doped oxide over undoped SiO2
- David Vender
- Gottlieb S. Oehrlein
- et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperElectromagnetic fields in a radio-frequency induction plasma
- J. Hopwood
- C.R. Guarnieri
- et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperDirectionality of Sputtered Cu Atoms in A Hollow Cathode Enhanced Planar Magnetron
- S.M. Rossnagel
- J.J. Cuomo
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperMolecular Dynamics Modeling of Microstructure and Stresses in Sputter-Deposited Thin Films
- F. Jones
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperReflection High-Energy Electron Diffraction Intensity Monitored Homoepitaxial Growth of Srtio3 Buffer Layer by Pulsed Laser Deposition
- M.Y. Chern
- A. Gupta
- et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperEffects of ion bombardment in plasma etching on the fluorinated silicon surface layer: Real-time and postplasma surface studies
- Gottlieb S. Oehrlein
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperCopper deposition by electron cyclotron resonance plasma
- A. Sugerrnan
- F.E. Turene
- et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperInfluence of surface-activated reaction kinetics on low-pressure chemical vapor deposition conformality over micro features
- Julian J. Hsieh
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperDynamics of the Desorption of D2and H2from Cu(111)
- C.T. Rettner
- H.A. Michelsen
- et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paper