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- Fei Liu
- Kang L. Wang
- 2007
- Nano Letters
Paper
Publications
26858 results for Science
Characterization and lithographic application of calix[4]resorcinarene derivatives
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- et al.
- 2007
- Chemistry of Materials
PaperMeasurements of acid generation by extreme ultraviolet irradiation in lithographic films
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- Dario L. Goldfarb
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- 2007
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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- 2007
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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- David A. Long
- Kerem Unal
- et al.
- 2007
- Advanced Materials
PaperIntersubband decay of 1-D exciton resonances in carbon nanotubes
- Tobias Hertel
- Vasili Perebeinos
- et al.
- 2007
- Nano Letters
PaperAre extreme ultraviolet resists ready for the 32 nm node?
- Karen Petrillo
- Yayi Wei
- et al.
- 2007
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperSensitivity analysis on causal events of WIP bubbles by a log-driven simulator
- Ryo Hirade
- Rudy Raymond
- et al.
- 2007
- WSC 2007
Conference paperCreation of sub-20-nm contact using diblock copolymer on a 300 mm wafer for complementary metal oxide semiconductor applications
- Wai-Kin Li
- Sam Yang
- 2007
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperNanometer-scale control of single quantum dot nucleation through focused ion-beam implantation
- A. Portavoce
- R. Hull
- et al.
- 2007
- Physical Review B - CMMP
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