Application of atomic-force microscopy to phase-shift masks
- A.P. Ghosh
- D.B. Dove
- et al.
- 1992
- Microlithography 1992
Conference paper
Publications
14468 results for Physical Sciences
Acid generation and acid diffusion in photoresist films
- D.R. McKean
- R.D. Allen
- et al.
- 1992
- Microlithography 1992
Conference paperCritical alignments in plane mirror interferometry
- N. Bobroff
- 1992
- Microlithography 1992
Conference paperQuantitation of airborne chemical contamination of chemically amplified resists using radiochemical analysis
- W.D. Hinsberg
- Scott A. MacDonald
- et al.
- 1992
- Microlithography 1992
Conference paperDirect phase measurements in phase-shift masks
- A.P. Ghosh
- D.B. Dove
- 1992
- Microlithography 1992
Conference paperNucleation and growth of Cu2O in the reduction of CuO thin films
- Jian Li
- J.W. Mayer
- et al.
- 1992
- Physical Review B
PaperQuantitative oxygen measurements in OMVPE Al x Ga1-x As grown by methyl precursors
- T.F. Kuech
- R.M. Potemski
- et al.
- 1992
- Journal of Electronic Materials
PaperSurface alloy formation studied by scanning tunneling microscopy: Cu(100) + Au-c(2 × 2)
- D.D. Chambliss
- S. Chiang
- 1992
- Surface Science
PaperFluorescence quenching of poly(methylphenylsilane) in solution
- Gregory M. Wallraff
- Mark Baier
- et al.
- 1992
- Journal of Inorganic and Organometallic Polymers
PaperScaling of vortex transport properties in high-temperature superconductors
- N.C. Yeh
- D.S. Reed
- et al.
- 1992
- Physical Review B
Paper