Bench evaluation of lithographic lenses from measurements of the point spread function
- Norman Bobroff
- Petra Fadi
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paper
Publications
9296 results for Computer Science
Condenser aberrations in Köhler illumination
- Douglas S. Goodman
- Alan E. Rosenbluth
- 1989
- Proceedings of SPIE 1989
Conference paperReading and writing of photochemical holes using gaalas diode lasers
- P. Pokrowsky
- W.E. Moerner
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paperSoft vacuum pulsed electron beam processing of teflon and teflon-like films
- J. Krishnaswamy
- G.J. Collins
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paperEnhancement of the reflectivity of multilayer x-ray mirrors by ion polishing
- Eberhard Spiller
- 1989
- Proceedings of SPIE 1989
Conference paperFilters for soft x-ray solar telescopes
- Eberhard Spiller
- Kurt Grebe
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paperA double crystal multilayer x-ray monochromator
- L. Golub
- A. Quillen
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paperModeling of optical alignment images for semiconductor structures
- Chi-Min Yuan
- Jerry Shaw
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paperImaging of liquid crystals using a tunneling microscope
- J.S. Foster
- J.E. Frommer
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paperThe P300: An approach to automated inspection of patterned wafers
- Virginia Brecher
- Raymond Bonner
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paper