Publications

9277 results for Computer Science

Aqueous developable, negative working resist made of chlorinated novolac resin
- - H. Hiraoka
  - A.M. Patlach
  - et al.
- 1989
- Proceedings of SPIE 1989
Conference paper
Sub-picosecond raman spectroscopy of semiconductors
- - J.C. Tsang
  - J.A. Kash
- 1989
- Proceedings of SPIE 1989
Conference paper
Critical issues in high density magnetic and optical data storage
- - Alan E. Bell
- 1989
- Proceedings of SPIE 1989
Conference paper
Soft x-ray diffraction of striated muscle
- - S.F. Fan
  - W.B. Yun
  - et al.
- 1989
- Proceedings of SPIE 1989
Conference paper
Chromium mask damage in excimer laser projection processing
- - J.T.C. Yeh
- 1989
- Proceedings of SPIE 1989
Conference paper
Reading and writing of photochemical holes using gaalas diode lasers
- - P. Pokrowsky
  - W.E. Moerner
  - et al.
- 1989
- Proceedings of SPIE 1989
Conference paper
Condenser aberrations in Köhler illumination
- - Douglas S. Goodman
  - Alan E. Rosenbluth
- 1989
- Proceedings of SPIE 1989
Conference paper
Gel resist processing for submicron CMOS and bipolar circuits
- - K.E. Petrillo
  - M. Smyth
  - et al.
- 1989
- Proceedings of SPIE 1989
Conference paper
Zero-Misalignment lithographic process using a photoresist with wavelength-selected tone
- - William D. Hinsberg
  - Scott A. MacDonald
  - et al.
- 1989
- Proceedings of SPIE 1989
Conference paper
Bench evaluation of lithographic lenses from measurements of the point spread function
- - Norman Bobroff
  - Petra Fadi
  - et al.
- 1989
- Proceedings of SPIE 1989
Conference paper