A Study of silicon incorporation in GaAs MOCVD Layers
- E. Veuhoff
- T.F. Kuech
- et al.
- 2019
- JES
Publications
14365 results for Physical Sciences
Reactive Ion Etching of Sputter Deposited Tantalum Oxide and its Etch Selectivity to Tantalum
- Yue Kuo
- 2019
- JES
Grazing Incidence X-Ray and Electrochemical Study of Thin Film Copper(111) on Mica
- Gary L. Barges
- Mahesh G. Samant
- 2019
- JES
Inhibition of Silicon Oxidation During Low Temperature Epitaxial Growth
- P.D. Agnelle
- T.O. Sedgwick
- 2019
- JES
The Ion Sensitivity of Boron Implanted Silicon Nitride Chemical Sensors
- Yin Hu
- Marvin H. White
- 2019
- JES
Reactive Ion Etching of Silicon Nitride Deposited by Different Methods in CF4/H2 Plasmas
- W.A. Lanford
- 2019
- JES
Current status of reduced temperature silicon epitaxy by chemical vapor deposition
- B.S. Meyerson
- 2019
- JES
Redeposition during Deep Trench Etching
- Jacob Jorne
- 2019
- JES
Selective Wet and Dry Etching of Hydrogenated Amorphous Silicon and Related Materials
- I. Haller
- Y.H. Lee
- et al.
- 2019
- JES
High temperature process limitation on TiSi2
- C.-Y. Ting
- F.M. d'Heurle
- et al.
- 2019
- JES