Resist-based polarization monitoring for 193nm high-numerical aperture lithography
- Richard Tu
- Gregory McIntyre
- 2008
- Lithography Asia 2008
Conference paper
Publications
26858 results for Science
Gate length scaling and high drive currents enabled for high performance SOI technology using high-κ/metal gate
- K. Henson
- H. Bu
- et al.
- 2008
- IEDM 2008
Conference paperWhen Harry Met Harri: Cross-lingual name spelling normalization
- Fei Huang
- Ahmad Emami
- et al.
- 2008
- EMNLP 2008
Conference paperOptimistic transactional active replication
- Hiroshi Horii
- Hayato Yamana
- 2008
- IMCOM 2008
Conference paperHigh-performance nMOSFET with in-situ phosphorus-doped embedded Si:C (ISPD eSi:C) source-drain stressor
- B. Yang
- R. Takalkar
- et al.
- 2008
- IEDM 2008
Conference paperService-oriented approach for implementing an extensible content management system
- Trieu C Chieu
- Zeng Liangzhao
- 2008
- SERVICES 2008
Conference paperEvaluating assistance of natural language policy authoring
- Kami Vaniea
- Clare-Marie Karat
- et al.
- 2008
- SOUPS 2008
Conference paperAnalyzing dispensing plan for emergency medical supplies in the event of bioterrorism
- Young M. Lee
- 2008
- WSC 2008
Conference paperCompiling for an indirect vector register architecture
- Dorit Nuzman
- Mircea Namolaru
- et al.
- 2008
- CF 2008
Conference paperWavefront generated by reflection of a plane wave from a conic section
- John A. Hoffnagle
- David L. Shealy
- 2008
- SPIE Optical Engineering + Applications 2008
Conference paper