Transfer etching of bilayer resists in oxygen-based plasmas
- A. Mahorowala
- K. Babich
- et al.
- 2000
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
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Reactive ion etch of 150 nm Al lines for interconnections in dynamic random access memory
- G. Stojakovic
- X.J. Ning
- 2000
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Current-induced nanochemistry: Local oxidation of thin metal films
- R. Martel
- Th. Schmidt
- et al.
- 1999
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Patterning of NiFe and NiFeCo in CO/NH3 high density plasmas
- K.B. Jung
- J. Hong
- et al.
- 1999
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Plasma induced copolymerization of hexafluoropropylene and octafluoropropane
- Pieter B. Leezenberg
- Timothy C. Reiley
- et al.
- 1999
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Investigation of slider surfaces after wear using photoemission electron microscopy
- Simone Anders
- Thomas Stammler
- et al.
- 1999
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
High resolution x-ray photoelectron spectroscopy and INDO/S-CI study of the core electron shakeup states of pyromellitic dianhydride-4,4′-oxydianiline polyimide
- Y. Nakayama
- P. Persson
- et al.
- 1999
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Interdiffusion studies of single crystal TiN/NbN superlattice thin films
- C. Engström
- J. Birch
- et al.
- 1999
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Enhanced secondary electron yield from oxidized regions on amorphous carbon films studied by x-ray spectromicroscopy
- Javier Diaz
- Simone Anders
- et al.
- 1999
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Comparison of Cl2 and F2 based chemistries for the inductively coupled plasma etching of NiMnSb thin films
- J. Hong
- J.A. Caballero
- et al.
- 1999
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films