Publications

358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Deposition of diamondlike carbon using a planar radio frequency induction plasma
- - D.L. Pappas
  - J. Hod wood
  - et al.
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Morphology and bonding measured from boron-nitride powders and films using near-edge x-ray absorption fine structure
- - T. Sato
  - A. Chaiken
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Hot electron scattering effects in metal-semiconductor structures and their role in interface transport
- - A. Bauer
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Si(100)2-1+Sb surfaces studied with photoemission and optical spectroscopy
- - H. Bernhoff
  - D. Purdie
  - et al.
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Modification of the PHI sample mount for multiple- or micropositioning for Zalar rotation
- - Paul Soo
  - David L. Neiman
  - et al.
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Influence of surface-activated reaction kinetics on low-pressure chemical vapor deposition conformality over micro features
- - Julian J. Hsieh
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Copper deposition by electron cyclotron resonance plasma
- - A. Sugerrnan
  - F.E. Turene
  - et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Reactive Ion Etching of Sige Alloys using Fluorine-Containing Plasmas *
- - James W. Corbett
  - Gottlieb S. Oehrlein
  - et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Reflection High-Energy Electron Diffraction Intensity Monitored Homoepitaxial Growth of Srtio₃ Buffer Layer by Pulsed Laser Deposition
- - M.Y. Chern
  - A. Gupta
  - et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Molecular Dynamics Modeling of Microstructure and Stresses in Sputter-Deposited Thin Films
- - F. Jones
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films