Selective Deposition and Bond Strain Relaxation in Silicon PECVD Using Time Modulated Silane Flow
- Gregory N. Parsons
- John J. Boland
- et al.
- 1992
- Japanese Journal of Applied Physics
Publications
129 results at Japanese Journal of Applied Physics
Servo signal simulation of an mo disk with embossed pits
- Kiyoshi Kobayashi
- Fumiaki Yamada
- et al.
- 1992
- Japanese Journal of Applied Physics
Quantum size effect of excitonic band-edge luminescence in strained si1-xgex/si single quantum well structures grown by gas-source si molecular beam epitaxy
- Susumu Fukatsu
- Hironobu Yoshida
- et al.
- 1992
- Japanese Journal of Applied Physics
Crossed-beam study of initial vibrational distribution of krf excimer produced in the reaction of kr* + f2
- Haruko Komatsu
- Satoru S. Kano
- et al.
- 1992
- Japanese Journal of Applied Physics
Pattern formation in the transient periodic splay freedericksz transition in a nematic liquid crystal
- Hiap. Liew Ong
- 1992
- Japanese Journal of Applied Physics
Two-domain 80°-twisted nematic liquid crystal display for grayscale applications
- K.H. Yang
- 1992
- Japanese Journal of Applied Physics
High-power continuous-wave ultraviolet generation by frequency doubling of an argon laser
- Yoichi Taira
- 1992
- Japanese Journal of Applied Physics
Surface-imaged silicon polymers for 193-nm excimer laser lithography
- Patricia A. Bianconi
- David A. Smith
- et al.
- 1992
- Japanese Journal of Applied Physics
Advances in chemical amplification resist systems
- Hiroshi Ito
- 1992
- Japanese Journal of Applied Physics
A scanning tunneling microscope based microcolumn system
- U. Staufer
- D. Kern
- 1992
- Japanese Journal of Applied Physics