Publications

3593 results for Mathematical Sciences

Structural properties of optimal schedules with preemption
- - Ph. Baptiste
  - J. Carlier
  - et al.
- 2010
- Journal of Applied and Industrial Mathematics
3D-AFM enhancement for CD metrology dedicated to lithography sub-28-nm node requirements
- - Johann Foucher
  - Narender Rana
  - et al.
- 2010
- SPIE Advanced Lithography 2010
Simultaneous measurement of optical properties and geometry of resist using multiple scatterometry gratings
- - Alok Vaid
  - Matthew Sendelbach
  - et al.
- 2010
- SPIE Advanced Lithography 2010
Hybrid reference metrology exploiting patterning simulation
- - Narender Rana
  - Chas Archie
- 2010
- SPIE Advanced Lithography 2010
Spatial signature in local overlay measurements - "what CD-SEM can tell us and optical measurements can not"
- - Scott Halle
  - Daniel Moore
  - et al.
- 2010
- SPIE Advanced Lithography 2010
Sparse Markov Net learning with priors on regularization parameters
- - Katya Scheinberg
  - Irina Rish
  - et al.
- 2010
- ISAIM 2010
Smaller, smarter, faster, and more accurate: The new overlay metrology
- - Nelson M. Felix
  - Allen H. Gabor
  - et al.
- 2010
- SPIE Advanced Lithography 2010
Stabilizer subsystem codes with spatially local generators
- - Sergey Bravyi
- 2010
- ITW 2010
Quantum channel capacities
- - Graeme Smith
- 2010
- ITW 2010
Resist-based polarization monitoring with phase-shift masks at 1.35 numerical aperture: Tool-to-tool comparison
- - Gregory McIntyre
  - Richard Tu
  - et al.
- 2010
- SPIE Advanced Lithography 2010