Process latitude study of focused ion-beam-deposited gold for clear x-ray mask repair
- Patricia G. Blauner
- Andrew D. Dubner
- et al.
- 1993
- Microlithography 1993
Conference paper
Publications
9296 results for Computer Science
Fully-scaled 0.25-micron bipolar technology using variable shaped electron-beam lithography
- Philip J. Coane
- Kaolin G. Chiong
- et al.
- 1993
- Microlithography 1993
Conference paperA unification-based parser for relational Grammar
- David E. Johnson
- Adam Meyers
- et al.
- 1993
- ACL 1993
Conference paperTowards history-based Grammars: Using richer models for probabilistic parsing
- Ezra Black
- Fred Jelinek
- et al.
- 1993
- ACL 1993
Conference paperGeneration of tunable, fcintosecond-tiinc-scale, vuv pulses by four-wave difference-frequency mixing in xenon
- J.H. Glownia
- D.R. Gnass
- et al.
- 1993
- SPIE OE/LASE 1993
Conference paperScanning capacitance detection and charge trapping in NOS
- B.D. Terris
- R.C. Barrett
- et al.
- 1993
- SPIE OE/LASE 1993
Conference paperSplitting a configuration in a simplex
- Kazumiti Numata
- Takeshi Tokuyama
- 1993
- Algorithmica
PaperAlgorithms for projecting points to give the most uniform distribution with applications to hashing
- Tetsuo Asano
- Takeshi Tokuyama
- 1993
- Algorithmica
PaperTRACK II: A multi-processor robot controller
- D. Bar-On
- D. Gershon
- et al.
- 1993
- COMPEURO 1993
Conference paperOptical properties of planar and selectively grown SiGe/Si multiple quantum wells
- Detlev A. Grützmacher
- Thomas O. Sedgwick
- et al.
- 1993
- SPIE Physical Concepts of Materials for Novel Optoelectronic Device Applications 1993
Conference paper