Process optimization of APEX-E
- Karen Petrillo
- 1993
- Microlithography 1993
Conference paper
Publications
9296 results for Computer Science
Developments in 2D AFM metrology
- Diana Nyyssonen
- 1993
- Microlithography 1993
Conference paperPost-exposure bake as a process-control parameter for chemically-amplffied photoresist
- John L. Sturtevant
- Steven J. Holmes
- et al.
- 1993
- Microlithography 1993
Conference paperA tetrahedral interpolation technique for color space conversion
- James M. Kasson
- Wil Plouffe
- et al.
- 1993
- IS&T/SPIE Electronic Imaging 1993
Conference paperFinite-model theory - a personal perspective
- 1993
- Theoretical Computer Science
PaperOn the complexity of queries in the logical data model
- Gabriel M. Kuper
- Moshe Y. Vardi
- 1993
- Theoretical Computer Science
PaperPARADIGM: A compiler for automatic data distribution on multicomputers
- Manish Gupta
- Prithviraj Banerjee
- 1993
- ICS 1993
Conference paperState representation tradeoffs in Markov chains of serialization delays in computer systems
- Alexander Thomasian
- Behzad Nadji
- 1993
- CSSE
PaperMixed e-beam/optical lithography process for the fabrication of sub-0.25-μm poly gates
- Keith T. Kwietniak
- Michael G. Rosenfield
- et al.
- 1993
- Microlithography 1993
Conference paperPhotoresist process latitude optimization for synchrotron x-ray lithography
- Andrew T. Pomerene
- David E. Seeger
- et al.
- 1993
- Microlithography 1993
Conference paper