Surface light-induced changes in thin polymer films
- Andrew Skumanich
- 1993
- SPIE Optics Quebec 1993
Conference paper
Publications
9296 results for Computer Science
Localization of excitations in silicon chains by electron donating side groups
- D.A.Mcl. Smith
- S.A. Williams
- et al.
- 1993
- SPIE Optics Quebec 1993
Conference paperCharacterization of band structures and surface modes in two-dimensional photonic crystals
- William M. Robertson
- G. Arjavalingam
- et al.
- 1993
- SPIE Optics Quebec 1993
Conference paperThermally stable chromophores and polymers for χ(2) applications
- R.D. Miller
- K. Betterton
- et al.
- 1993
- SPIE Optics Quebec 1993
Conference paperApproximating the noninferior set in multiobjective linear programming problems
- Rajendra S. Solanki
- Perry A. Appino
- et al.
- 1993
- EJOR
PaperComparison of scalar and vector diffraction modelling for deep-UV lithography
- Bruce W. Smith
- Donis G. Flagello
- et al.
- 1993
- Microlithography 1993
Conference paper170 nm gates fabricated by phase-shift mask and top anti-reflector process
- T.A. Brunner
- P.N. Sanda
- et al.
- 1993
- Microlithography 1993
Conference paperVector diffraction analysis of phase-mask imaging in photoresist films
- Donis G. Flagello
- Alan E. Rosenbluth
- 1993
- Microlithography 1993
Conference paperRim phase-shift mask combined with off-axis illumination: A path to 0.5Λ/NA geometries
- T.A. Brunner
- 1993
- Microlithography 1993
Conference paperTAR processing for CD control in I-line and 248 nm lithography
- Christopher Lyons
- Nicholas Eib
- et al.
- 1993
- Microlithography 1993
Conference paper