Principles and techniques of STM lithography
- Mark A. McCord
- Roger Fabian W. Pease
- 1993
- SPIE Advanced Optical Technologies 1993
Conference paper
Publications
9280 results for Computer Science
A NEW INTERFACE PARADIGM: AUTOMATIC RECOGNITION OF INTEGRATED SPEECH AND HANDWRITING INFORMATION
- Jerome R. Bellegarda
- Dimitri Kanevsky
- 1993
- INTERSPEECH - Eurospeech 1993
Conference paperWORD LOOKAHEAD SCHEME FOR CROSS-WORD RIGHT CONTEXT MODELS IN A STACK DECODER
- L.R. Bahl
- Peter V. de Souza
- et al.
- 1993
- INTERSPEECH - Eurospeech 1993
Conference paperA representation language for mechanical behavior
- Dorothy Neville
- Leo Joskowicz
- 1993
- ASME DETC 1993
Conference paperCharacterization and simulation of acid catalyzed DUV positive photoresist
- Nicholas K. Eib
- Eytan Barouch
- et al.
- 1993
- Microlithography 1993
Conference paperBase-catalyzed photosensitive polyimide
- Dennis R. McKean
- Gregory M. Waliraff
- et al.
- 1993
- Microlithography 1993
Conference paperThe influence of residual casting solvent on the dissolution behavior of diazonaphthoquinone resists
- V. Rao
- W.D. Hinsberg
- et al.
- 1993
- Microlithography 1993
Conference paperResist materials design: Base-catalyzed chemical amplification
- C.G. Wilison
- J.F. Cameron
- et al.
- 1993
- Microlithography 1993
Conference paperComparison of liquid- And vapor-phase silylation processes for 193-nm positive-tone lithography
- Mark A. Hartney
- Roderick R. Kunz
- et al.
- 1993
- Microlithography 1993
Conference paperMolecular design for stabilization of chemical amplification resist toward airborne contamination
- Hiroshi Ito
- William P. England
- et al.
- 1993
- Microlithography 1993
Conference paper