Materials evaluation of antireflective coatings for single-layer 193-nm lithography
- Roderick R. Kunz
- Robert D. Allen
- 1994
- Microlithography 1994
Conference paper
Publications
14468 results for Physical Sciences
0.25-μm lithography development using positive mode top surface imaging photoresist
- Douglas C. La Tulipe
- John P. Simons
- et al.
- 1994
- Microlithography 1994
Conference paperTemperature dependence of the electron-spin resonance in nitrogen-rich amorphous silicon nitride
- D. Chen
- J.M. Viner
- et al.
- 1994
- Physical Review B
PaperGaAs c(4×4) surface structure in organometallic vapor-phase epitaxy
- A.P. Payne
- P.H. Fuoss
- et al.
- 1994
- Physical Review B
PaperFerromagnetism and spin glass in amorphous FeZr alloys
- M. Yu
- Y. Kakehashi
- et al.
- 1994
- Materials Science and Engineering A
PaperTheoretical analysis of light-inductive forces in scanning probe microscopy
- Christian Girard
- Alain Dereux
- et al.
- 1994
- Physical Review B
PaperEnhancement of Curie temperature in amorphous CoY alloys
- Yoshiro Kakehashi
- Ming Yu
- et al.
- 1994
- Materials Science and Engineering A
PaperUnoccupied states of Cr on Au(100), Ag(100), and Cu(100)
- M.E. Haugan
- Qibiao Chen
- et al.
- 1994
- Physical Review B
PaperOne-dimensional image state on stepped Cu(100)
- J.E. Ortega
- F.J. Himpsel
- et al.
- 1994
- Physical Review B
PaperCan hospitals afford digital storage for imagery?
- W.F. Cody
- H.M. Gladney
- et al.
- 1994
- SPIE Medical Imaging 1994
Conference paper