Publications

3493 results for Materials Discovery

In-situ X-ray Diffraction study of Metal Induced Crystallization of amorphous silicon
- - W. Knaepen
  - C. Detavernier
  - et al.
- 2008
- Thin Solid Films
Fabrication of 20 nm half-pitch gratings by corrugation-directed self-assembly
- - Ho-Cheol Kim
  - Charles T. Rettner
  - et al.
- 2008
- Nanotechnology
Role of chamber dimension in fluorocarbon based deposition and etching of Si O2 and its effects on gas and surface-phase chemistry
- - E. Joseph
  - B.-S. Zhou
  - et al.
- 2008
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Development of a simple mixed-mode fracture test and the resulting fracture energy envelope for an adhesive bond
- - Soojae Park
  - David A. Dillard
- 2008
- International Journal of Fracture
Tunneling phenomena in carbon nanotube field-effect transistors
- - Joachim Knoch
  - Joerg Appenzeller
- 2008
- Physica Status Solidi (A) Applications and Materials Science
Undercooling and microhardness of Pb-free solders on various under bump metallurgies
- - Moon Gi Cho
  - Sung K. Kang
  - et al.
- 2008
- Journal of Materials Research
Plasma ash processing solutions for advanced interconnect technology
- - N. Fuller
  - M.A. Worsley
  - et al.
- 2008
- Thin Solid Films
Chemical and structural modifications in a 193-nm photoresist after low-k dry etch
- - E. Kesters
  - M. Claes
  - et al.
- 2008
- Thin Solid Films
Effect of elevated implant temperature on amorphization and activation in as-implanted silicon-on-insulator layers
- - Katherine L. Saenger
  - Stephen W. Bedell
  - et al.
- 2008
- MRS Spring Meeting 2008
Extendibility study of a PVD Cu seed process with Ar+ Rf-Plasma enhanced coverage for 45nm interconnects
- - Andrew H. Simon
  - Tibor Bolom
  - et al.
- 2008
- MRS Spring Meeting 2008