Publications

26853 results for Science

Fabrication of dual damascene BEOL structures using a multi-level multiple exposure (MLME) scheme - Part 2. RIE-based pattern transfer and completion of dual damascene process yielding an electrically functional via chain
- - Stefan Harrer
  - John C Arnold
  - et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
Conference paper
Multi-level integration of patternable low-κ material into advanced Cu BEOL
- - Qinghuang Lin
  - Shyng-Tsong Chen
  - et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
Conference paper
High contact angle fluorosulfonamide-based materials for immersion lithography
- - Daniel P. Sanders
  - Linda K. Sundberg
  - et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
Conference paper
Learning and generalization with the information bottleneck
- - Ohad Shamir
  - Sivan Sabato
  - et al.
- 2010
- Theoretical Computer Science
Paper
Single mutation effects on conformational change and membrane deformation of influenza hemagglutinin fusion peptides
- - Jingyuan Li
  - Payel Das
  - et al.
- 2010
- Journal of Physical Chemistry B
Paper
Deposition of aluminum-doped zinc oxide thin films for optical applications using rf and dc magnetron sputter deposition
- - Kousik Sivakumar
  - S.M. Rossnagel
- 2010
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Improving the scalability of data center networks with traffic-aware virtual machine placement
- - Xiaoqiao Meng
  - Vasileios Pappas
  - et al.
- 2010
- INFOCOM 2010
Conference paper
Change management in enterprise IT systems: Process modeling and capacity-optimal scheduling
- - Praveen K. Muthuswamy
  - Koushik Kar
  - et al.
- 2010
- INFOCOM 2010
Conference paper
Direct write 3-dimensional nanopatterning using probes
- - David Pires
  - Armin Knoll
  - et al.
- 2010
- SPIE Advanced Lithography 2010
Conference paper
Self-assembling materials for lithographic patterning: Overview, status and moving forward
- - William Hinsberg
  - Joy Cheng
  - et al.
- 2010
- SPIE Advanced Lithography 2010
Conference paper