Dry Etching for VLSI—A Review
- L.M. Ephrath
- 2019
- JES
Publications
14361 results for Physical Sciences
The Fabrication of High Precision Nozzles by the Anisotropic Etching of (100) Silicon
- E. Bassous
- E.F. Baran
- 2019
- JES
High Temperature Flow Resistance of Micron Sized Images in AZ Resists
- H. Hiraoka
- J. Pacansky
- 2019
- JES
Ellipsometry Measurements of Polycrystalline Silicon Films
- E.A. Irene
- D.W. Dong
- 2019
- JES
Controlled Collapse Reflow for Josephson Chip Bonding
- C.-Y. Ting
- K.R. Grebe
- et al.
- 2019
- JES
Deposition Techniques and Heat Transfer Properties of Porous Aluminum
- V.J. Silvestri
- K.S. Sachar
- 2019
- JES
Anodic Etching of Defects in P-Type Silicon
- H. Föll
- 2019
- JES
The Dependence of the Memory Effect in ZnS:Mn A-C Thin Film Electroluminescence on Mn Distribution
- V. Marrello
- A.A. Onton
- 2019
- JES
Electrical Properties of Al/Ti Contact Metallurgy for VLSI Application
- C.-Y. Ting
- B.L. Crowder
- 2019
- JES
Effect of CO on the Low Temperature Diffusion of Cr and Si Through Thin Gold Films
- Chin-An Chang
- 2019
- JES