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Preparation and Some Properties of Chemically Vapor-Deposited Si-Rich SiO and Si3N4 FilmsD.W. DongE.A. Ireneet al.2019JESPaper
Properties of AI2O3 Films Deposited from the AICI3, CO2, and H2 SystemV.J. SilvestriC.M. Osburnet al.2019JESPaper
Silicon Oxidation Studies: The Oxidation of Heavily B- and P-Doped Single Crystal SiliconE.A. IreneD.W. Dong2019JESPaper