TiO2 Antireflection Coatings by a Low Temperature Spray Process
- H.J. Hovel
- 2019
- JES
Paper
Publications
509 results at JES
An electron microscope investigation of the effect of phosphorous doping on the plasma etching of polycrystalline silicon
- E.A. Irene
- E. Tierney
- et al.
- 2019
- JES
PaperResolution Limits Of PMMA Resist for Exposure with 50 kV Electrons
- Alec N. Broers
- 2019
- JES
PaperFabrication Processes for a Silicon Substrate Package for Integrated Gallium Arsenide Laser Arrays
- Michael J. Brady
- 2019
- JES
PaperThe Defect Structure of Pure and Doped ZnSe
- A. Ray
- F.A. Kröger
- 2019
- JES
PaperTitanium Dioxide Films to Improve Photoresist Adhesion
- John C. Marinace
- Ralph C. McGibbon
- 2019
- JES
PaperInteractions Between Cr and Pt Films: New Cr-Pt Phases
- J.E.E. Baglin
- F.M. d'Heurle
- et al.
- 2019
- JES
PaperEffects of Several Parameters on the Corrosion Rates of Al Conductors in Integrated Circuits
- Israel Lerner
- Jerome M. Eldridge
- 2019
- JES
PaperOne-Micron Polycide (WSI2 on Poly-Si) MOSFET Technology
- M.Y. Tsai
- H.H. Chao
- et al.
- 2019
- JES
PaperEffect of Plating Parameters on Electrodeposition of NiFe
- J. Horkans
- 2019
- JES
Paper