Publications

3541 results for Mathematical Sciences

EUV OPC for 56 nm metal pitch
- - Martin Burkhardt
  - Matt Colburn
  - et al.
- 2011
- SPIE Advanced Lithography 2011
Architecture and mechanisms of Hadoop distributed file system
- - Wen-Qiang Xu
  - Long-Bin Lai
  - et al.
- 2011
- Dongbei Daxue Xuebao/Journal of Northeastern University
A trace-based Java JIT compiler retrofitted from a method-based compiler
- - Hiroshi Inoue
  - Hiroshige Hayashizaki
  - et al.
- 2011
- CGO 2011
Adaptive identification in torii in the king lattice
- - Yael Ben-Haim
  - Antoine Lobstein
  - et al.
- 2011
- Electronic Journal of Combinatorics
Reconciling measurements in AFM reference metrology when using different probing techniques
- - Narender Rana
  - Charles Archie
  - et al.
- 2011
- SPIE Advanced Lithography 2011
Overlay improvement roadmap: Strategies for scanner control and product disposition for 5-nm overlay
- - Nelson M. Felix
  - Allen H. Gabor
  - et al.
- 2011
- SPIE Advanced Lithography 2011
Revisit pattern collapse for 14nm node and beyond
- - Kenji Yoshimoto
  - Craig Higgins
  - et al.
- 2011
- SPIE Advanced Lithography 2011
Optimization of pitch-split double patterning photoresist for applications at the 16nm node
- - Steven J. Holmes
  - Cherry Tang
  - et al.
- 2011
- SPIE Advanced Lithography 2011
Bound PAG resists: An EUV and electron beam lithography performance comparison of fluoropolymers
- - Luisa D. Bozano
  - Phillip J. Brock
  - et al.
- 2011
- SPIE Advanced Lithography 2011
Critical challenges for "non-critical" layers
- - J.M. Gomez
  - I.Y. Popova
  - et al.
- 2011
- SPIE Advanced Lithography 2011