A new family of non-chemically amplified resists
- Ari Aviram
- Marie Angelopoulos
- et al.
- 1998
- Microlithography 1998
Publications
9281 results for Computer Science
Effects of underlayer on performance of bilayer resists for 248-nm lithography
- Katherina Babich
- Alessandro Callegari
- et al.
- 1998
- Microlithography 1998
Mixing of 28-THz CO2-laser radiation by nanometer thin film Ni-NiO-Ni diodes with difference frequencies up to 176 GHz
- C. Fumeaux
- Fritz K. Kneubühl
- et al.
- 1998
- Proceedings of SPIE - The International Society for Optical Engineering
New approaches to production-worthy 193-nm photoresists based on acrylic copolymers
- Thomas I. Wallow
- Robert D. Allen
- et al.
- 1998
- Microlithography 1998
Designing a testable System on a Chip
- S.V. Kosonocky
- A.A. Bright
- et al.
- 1998
- VTS 1998
Lithographic characteristics of 193-nm resists imaged at 193 and 248 nm
- Juliann Opitz
- Robert D. Allen
- et al.
- 1998
- Microlithography 1998
High speed serializing/de-serializing design-for-test method for evaluating a 1 GHz microprocessor
- D. Heidel
- S. Dhong
- et al.
- 1998
- VTS 1998
Substrate designs and contacts for organic light-emitting displays
- E.I. Haskal
- H. Vestweber
- et al.
- 1998
- SPIE Optical Science, Engineering, and Instrumentation 1998
Task-specific visualization design: A case study in operational weather forecasting
- L.A. Treinish
- 1998
- VIS 1998
Memory characterization of a parallel data mining workload
- Jin-Soo Kim
- Xiaohan Qin
- et al.
- 1998
- WWC 1998