DUV stability of carbon films for attenuated phase shift mask applications
- Alessandro Callegari
- Katherina Babich
- et al.
- 1998
- SPIE Advanced Lithography 1998
Conference paper
Publications
9299 results for Computer Science
A "Container" MIB for end-to-end management of ADSL networks
- Andy G. Lean
- Frank A. Schaffa
- et al.
- 1998
- SPIE SYBEN-Broadband European Networks and Electronic Image Capture and Publishing 1998
Conference paperRange-based bitmap indexing for high cardinality attributes with skew
- Kun-Lung Wu
- Philip S. Yu
- 1998
- COMPSAC 1998
Conference paperOptimizing the holographic digital data storage channel
- G.W. Burr
- Jonathan Ashley
- et al.
- 1998
- Conference on Advanced Optical Memories and Interfaces to Computer Storage 1998
Conference paperDescreening printer-ready images
- A. Ravishankar Rao
- Frederick Mintzer
- et al.
- 1998
- NIP 1998
Conference paperMixing of 28-THz CO2-laser radiation by nanometer thin film Ni-NiO-Ni diodes with difference frequencies up to 176 GHz
- C. Fumeaux
- Fritz K. Kneubühl
- et al.
- 1998
- Proceedings of SPIE - The International Society for Optical Engineering
Conference paperPositive bilayer resists for 248- and 193-nm lithography
- Ratnam Sooriyakumaran
- Gregory M. Wallraff
- et al.
- 1998
- Microlithography 1998
Conference paperOptical lens specifications from the user's perspective
- Christopher J. Progler
- Donald C. Wheeler
- 1998
- SPIE Advanced Lithography 1998
Conference paperDesigning a testable System on a Chip
- S.V. Kosonocky
- A.A. Bright
- et al.
- 1998
- VTS 1998
Conference paperReactive ion etching of 193-nm resist candidates: Current platforms and future requirements
- Thomas I. Wallow
- Phillip J. Brock
- et al.
- 1998
- Microlithography 1998
Conference paper