Publications

26865 results for Science

Reconciling measurements in AFM reference metrology when using different probing techniques
- - Narender Rana
  - Charles Archie
  - et al.
- 2011
- SPIE Advanced Lithography 2011
Conference paper
Overlay improvement roadmap: Strategies for scanner control and product disposition for 5-nm overlay
- - Nelson M. Felix
  - Allen H. Gabor
  - et al.
- 2011
- SPIE Advanced Lithography 2011
Conference paper
Adaptive optimization in the Jalapeño JVM
- - Matthew Arnold
  - Stephen Fink
  - et al.
- 2011
- ACM SIGPLAN Notices
Paper
Electrochemical protection of thin film electrodes in solid state nanopores
- - Stefan Harrer
  - Philip S. Waggoner
  - et al.
- 2011
- Nanotechnology
Paper
If human cognition is adaptive, can human knowledge consist of encodings?
- - Robert L. Campbell
  - Mark H. Bickhard
- 2011
- Behavioral and Brain Sciences
Paper
Toward unified cognitive theory: The path is well worn and the trenches are deep
- - John M. Carroll
- 2011
- Behavioral and Brain Sciences
Paper
Performance of tri-layer process required for 22nm and beyond
- - Yayi Wei
  - Martin Glodde
  - et al.
- 2011
- SPIE Advanced Lithography 2011
Conference paper
Critical challenges for "non-critical" layers
- - J.M. Gomez
  - I.Y. Popova
  - et al.
- 2011
- SPIE Advanced Lithography 2011
Conference paper
Revisit pattern collapse for 14nm node and beyond
- - Kenji Yoshimoto
  - Craig Higgins
  - et al.
- 2011
- SPIE Advanced Lithography 2011
Conference paper
Self-assembly patterning for sub-15nm half-pitch: A transition from lab to fab
- - Chris Bencher
  - Jeffrey Smith
  - et al.
- 2011
- SPIE Advanced Lithography 2011
Conference paper