Investigation of pattern wiggling for spin-on organic hardmask materials
- Goji Wakamatsu
- Kentaro Goto
- et al.
- 2012
- Proceedings of SPIE - The International Society for Optical Engineering 2012
Publications
3593 results for Mathematical Sciences
Bridging CD metrology gaps of advanced patterning with assistance of nanomolding
- Narender Rana
- Dario Goldfarb
- 2012
- SPIE Advanced Lithography 2012
Dose-focus monitor technique using CD-SEM and application to local variation analysis
- Shoji Hotta
- Timothy Brunner
- et al.
- 2012
- SPIE Advanced Lithography 2012
Conductive layer for charge dissipation during electron-beam exposures
- Luisa D. Bozano
- Ratnam Sooriyakumaran
- et al.
- 2012
- Proceedings of SPIE - The International Society for Optical Engineering 2012
Thin-film platinum nanowires as sub-wavelength bolometers
- Pauline Renoux
- Alice Beauny
- et al.
- 2012
- Proceedings of SPIE - The International Society for Optical Engineering 2012
Rejoinder
- Huijing Jiang
- Nicoleta Serban
- 2012
- Technometrics
Clustering random curves under spatial interdependence with application to service accessibility
- Huijing Jiang
- Nicoleta Serban
- 2012
- Technometrics
Rare-earth-doped materials with application to optical signal processing, quantum information science, and medical imaging technology
- R.L. Cone
- C.W. Thiel
- et al.
- 2012
- Proceedings of SPIE - The International Society for Optical Engineering 2012
On the query complexity of testing orientations for being Eulerian
- Eldar Fischer
- Oded Lachish
- et al.
- 2012
- ACM Transactions on Algorithms
Exploring context and content links in social media: A latent space method
- Guo-Jun Qi
- Charu Aggarwal
- et al.
- 2012
- IEEE TPAMI