The effects of plasma exposure on low-k dielectric materials
- J.L. Shohet
- H. Ren
- et al.
- 2012
- SPIE Advanced Lithography 2012
Conference paper
Publications
3605 results for Mathematical Sciences
Advanced plasma etch technologies for nanopatterning
- Rich Wise
- 2012
- SPIE Advanced Lithography 2012
Conference paperPatterning of CMOS device structures for 40-80nm pitches and beyond
- Sebastian U. Engelmann
- R.M. Martin
- et al.
- 2012
- SPIE Advanced Lithography 2012
Conference paperTrust and obfuscation
- Murat Sensoy
- Chatschik Bisdikian
- et al.
- 2012
- SPIE Defense + Security 2012
Conference paperAn architecture for distributed video applications based on declarative networking
- Xiping Wang
- Cesar Gonzales
- et al.
- 2012
- SPIE Defense + Security 2012
Conference paperMechanisms of lifetime degradation in Si/ARC samples patterned by laser lift-off
- Katherine Saenger
- 2012
- LMPSE 2012
Conference paperInteractive visual salesforce analytics
- Kush R. Varshney
- Jamie C. Rasmussen
- et al.
- 2012
- AIS-ICIS 2012
Conference paperIntent-based resource deployment in wireless sensor networks
- Geeth De Mel
- Tien Pham
- et al.
- 2012
- SPIE Defense + Security 2012
Conference paperTasking and sharing sensing assets using controlled natural language
- Alun Preece
- Diego Pizzocaro
- et al.
- 2012
- SPIE Defense + Security 2012
Conference paperStudy of the effects of structural properties on the photoluminescence behavior of erbium thin films
- Himani S. Kamineni
- Spyros Gallis
- et al.
- 2012
- Proceedings of SPIE - The International Society for Optical Engineering 2012
Conference paper