Directed self-assembly process implementation in a 300mm pilot line environment
- Chi-Chun Liu
- I. Cristina Estrada-Raygoza
- et al.
- 2013
- SPIE Advanced Lithography 2013
Conference paper
Publications
3602 results for Mathematical Sciences
Benchmarking study of 3D mask modeling for 2 and 1x nodes
- Chang An Wang
- Chao-Chun Liang
- et al.
- 2013
- SPIE Advanced Lithography 2013
Conference paperMonitoring the evolution of Line Edge Roughness during resist development using an analog of quenched flow kinetics
- M.I. Sanchez
- L.K. Sundberg
- et al.
- 2013
- SPIE Advanced Lithography 2013
Conference paperComputational aspects of optical lithography extension by Directed Self-Assembly
- Kafai Lai
- Chi-Chun Liu
- et al.
- 2013
- SPIE Advanced Lithography 2013
Conference paperOptimal bounds for Johnson-Lindenstrauss transforms and streaming problems with subconstant error
- T.S. Jayram
- David P. Woodruff
- 2013
- ACM Transactions on Algorithms
PaperAn accelerated first-order method for solving SOS relaxations of unconstrained polynomial optimization problems
- Dimitris Bertsimas
- Robert M. Freund
- et al.
- 2013
- Optimization Methods and Software
PaperDynamical properties of Discrete Reaction Networks
- Loïc Paulevé
- Gheorghe Craciun
- et al.
- 2013
- Journal of Mathematical Biology
PaperPlanning Singularity-Free Paths on Closed-Chain Manipulators
- Oriol Bohigas
- Michael E. Henderson
- et al.
- 2013
- IEEE Transactions on Robotics
PaperEngineering future light emitting diodes and photovoltaics with inexpensive materials: Integrating ZnO and Si into GaN-based devices
- Can Bayram
- K.-T. Shiu
- et al.
- 2013
- SPIE OPTO 2013
Conference paperFlexible, stable, and easily processable optical silicones for low loss polymer waveguides
- Brandon W. Swatowski
- Chad M. Amb
- et al.
- 2013
- SPIE OPTO 2013
Conference paper