Publications

3611 results for Mathematical Sciences

Diffraction pattern based optimization of lithographic targets for improved printability
- - Shayak Banerjee
  - Kanak B. Agarwal
- 2013
- DfM-DPI 2013
Conference paper
Pattern transfer of directed self-assembly (DSA) patterns for CMOS device applications
- - Hsin-Yu Tsai
  - Hiroyuki Miyazoe
  - et al.
- 2013
- SPIE Advanced Lithography 2013
Conference paper
Advanced plasma etch for the 10nm node and beyond
- - Eric Joseph
  - Sebastian Engelmann
  - et al.
- 2013
- SPIE Advanced Lithography 2013
Conference paper
Etch correction and OPC, a look at the current state and future of etch correction
- - Ian Stobert
  - Derren Dunn
- 2013
- SPIE Advanced Lithography 2013
Conference paper
On the accuracy of different Fourier transforms of VLSI designs
- - Rajai Nasser
  - Paul Hurley
- 2013
- SPIE Advanced Lithography 2013
Conference paper
Enhancing resolution with pupil filtering for projection printing systems with fixed or restricted illumination angular distribution
- - Greg McIntyre
  - Leon Teeuwen
  - et al.
- 2013
- SPIE Advanced Lithography 2013
Conference paper
Benchmarking study of 3D mask modeling for 2 and 1x nodes
- - Chang An Wang
  - Chao-Chun Liang
  - et al.
- 2013
- SPIE Advanced Lithography 2013
Conference paper
Deterministically isolated gratings through the directed self-assembly of block copolymers
- - Gregory Sadasdf Doerk
  - Joy Y. Cheng
  - et al.
- 2013
- SPIE Advanced Lithography 2013
Conference paper
Enabling reverse tone imaging for via levels using attenuated Phase Shift Mask and source optimization
- - Bassem Hamieh
  - Hyun Chol Choi
  - et al.
- 2013
- SPIE Advanced Lithography 2013
Conference paper
Computational aspects of optical lithography extension by Directed Self-Assembly
- - Kafai Lai
  - Chi-Chun Liu
  - et al.
- 2013
- SPIE Advanced Lithography 2013
Conference paper