The mask error factor in optical lithography
- Alfred K. Wong
- Richard A. Ferguson
- et al.
- 2000
- IEEE Trans Semicond Manuf
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Publications
14468 results for Physical Sciences
Electrical testing of gold nanostructures by conducting atomic force microscopy
- Alexander Bietsch
- M. Alexander Schneider
- et al.
- 2000
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperBuried oxide channel field effect transistor
- J. Misewich
- A.G. Schrott
- 2000
- MRS Proceedings 2000
Conference paperOptimizing fabrication of buried oxide channel field effect transistors
- A.G. Schrott
- J. Misewich
- et al.
- 2000
- MRS Proceedings 2000
Conference paperShared memory switching + virtual output queuing: A robust and scalable switch
- R. Luijten
- Ton Engbersen
- et al.
- 2000
- MRS Proceedings 2000
Conference paperNovel low-k dual-phase materials prepared by PECVD
- A. Grill
- V.V. Patel
- 2000
- MRS Proceedings 2000
Conference paperMetallic adhesion forces and tunneling between atomically defined tip and sample
- A. Schirmeisen
- G. Cross
- et al.
- 2000
- Applied Surface Science
PaperJosephson vortices at tricrystal boundaries
- V.G. Kogan
- J.R. Clem
- et al.
- 2000
- Physical Review B - CMMP
PaperPlasma-induced surface segregation and oxidation in nickel-iron thin films
- R. Hsiao
- D. Mauri
- 2000
- Applied Surface Science
PaperDiamond-like carbon prepared by high density plasma
- J.C. Sánchez-López
- C. Donnet
- et al.
- 2000
- Diamond and Related Materials
Paper