Extending the performance of KRS-XE for high throughput electron beam lithography for advanced mask making
- David R. Medeiros
- Karen E. Petrillo
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
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Publications
14468 results for Physical Sciences
Burstein-Moss shift of n-doped In0.53Ga0.47As/inp
- Martín Muñoz
- Fred H. Pollak
- et al.
- 2001
- Physical Review B - CMMP
PaperNovel classes of cyclic olefin polymers for 193 nm lithography
- P. Rao Varanasi
- R.D. Allen
- et al.
- 2001
- J. Photopolym. Sci. Tech.
PaperSuppression of matching field effects by splay and pinning energy dispersion in YBa2Cu3O7 with columnar defects
- D. Niebieskikwiat
- A. Silhanek
- et al.
- 2001
- Physical Review B - CMMP
PaperAn algorithm for efficient segmentation and selection of representative frames in video sequences
- Konstantin Y. Kupeev
- Zohar Sivan
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
PaperPreisach analysis of epitaxial hard/soft bilayers
- D.R. Cornejo
- F.M. Rhen
- et al.
- 2001
- Journal of Magnetism and Magnetic Materials
PaperMonodisperse 3d transition-metal (co, ni, fe) nanoparticles and their assembly into nanoparticle superlattices
- C.B. Murray
- Shouheng Sun
- et al.
- 2001
- MRS Bulletin
PaperProgress in read-write fast-access volume holographic data storage
- Geoffrey W. Burr
- Erwin Mecher
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
PaperEvaluation of molybdenum silicide for use as a 193 nm phase-shifting absorber in photomask manufacturing
- M. Hibbs
- M. Ushida
- et al.
- 2001
- Proceedings of SPIE- The International Society for Optical Engineering
PaperTribological and mechanical properties of diamond-like carbon prepared by high-density plasma
- J.C. Sánchez-López
- C. Donnet
- et al.
- 2001
- Diamond and Related Materials
Paper