Resist-based polarization monitoring with phase-shift masks at 1.35 numerical aperture: Tool-to-tool comparison
- Gregory McIntyre
- Richard Tu
- et al.
- 2010
- SPIE Advanced Lithography 2010
Publications
Date
Featured collections
Popular topics
3519 results for Mathematical Sciences
Smaller, smarter, faster, and more accurate: The new overlay metrology
- 2010
- SPIE Advanced Lithography 2010
Simultaneous measurement of optical properties and geometry of resist using multiple scatterometry gratings
- Alok Vaid
- Matthew Sendelbach
- et al.
- 2010
- SPIE Advanced Lithography 2010
New tools and methodology for advanced parametric and defect structure test
- Raphael Robertazzi
- Louis Medina
- et al.
- 2010
- IEEE ITC 2010
Single photon emission and detection at the nanoscale utilizing semiconductor nanowires
- Michael E. Reimer
- Maarten P. Van Kouwen
- et al.
- 2010
- SPIE Optical Engineering + Applications 2010
Super-duper-activation of the zero-error quantum capacity
- Jianxin Chen
- Toby S. Cubitt
- et al.
- 2010
- ISIT 2010
Coding for sensing in content addressable memories
- Luis A. Lastras-Montaño
- Michele Franceschini
- et al.
- 2010
- ISIT 2010
Algorithms for memories with stuck cells
- Luis A. Lastras-Montaño
- Ashish Jagmohan
- et al.
- 2010
- ISIT 2010
Rewritable storage channels with limited number of rewrite iterations
- Thomas Mittelholzer
- Luis A. Lastras-Montaño
- et al.
- 2010
- ISIT 2010
The capacity of the uniform noise rewritable channel with average cost
- Luis A. Lastras-Montaño
- Michele Franceschini
- et al.
- 2010
- ISIT 2010