Defects on high resolution negative-tone resist The revenge of the blobs
- M.I. Sanchez
- L.K. Sundberg
- et al.
- 2013
- SPIE Photomask Technology + EUV Lithography 2013
Publications
3548 results for Mathematical Sciences
Two-dimensional mask effects at the 14 nm logic node
- A.E. Zweber
- A.E. McGuire
- et al.
- 2013
- SPIE Photomask Technology 2013
Thermal probe nanolithography: In-situ inspection, high-speed, high-resolution, 3D
- Felix Holzner
- Philip Paul
- et al.
- 2013
- EMLC 2013
Microfluidics and its applications in quantitative biology
- Yuhai Tu
- 2013
- Quantitative Biology
Nanosensors for next generation drug screening
- Sridhar K. Kannam
- Matthew T. Downton
- et al.
- 2013
- SPIE Micro+Nano Materials, Devices, and Applications 2013
Effect of data placement on the reliability of data storage systems
- Vinodh Venkatesan
- 2013
- HPCS 2013
Roadmap towards ultimately-efficient zeta-scale datacenters
- 2013
- HPCS 2013
Markov chain aggregation and its applications to combinatorial reaction networks
- Arnab Ganguly
- Tatjana Petrov
- et al.
- 2013
- Journal of Mathematical Biology
Enhancing frequency shifted speech signals in single side-band communication
- Sriram Ganapathy
- Jason Pelecanos
- 2013
- IEEE SPL
A decision analysis approach to financial risk management in strategic outsourcing contracts
- Bonnie K. Ray
- Shu Tao
- et al.
- 2013
- EURO Journal on Decision Processes