Systematic studies on reactive ion etch-induced deformations of organic underlayers
- Martin Glodde
- Sebastian Engelmann
- et al.
- 2011
- SPIE Advanced Lithography 2011
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3519 results for Mathematical Sciences
Fundamental investigation of Negative Tone Development (NTD) for the 22nm node (and beyond)
- Guillaume Landie
- Yongan Xu
- et al.
- 2011
- SPIE Advanced Lithography 2011
Integrated model-based retargeting and optical proximity correction
- Kanak B. Agarwal
- Shayak Banerjee
- 2011
- SPIE Advanced Lithography 2011
Single exposure contacts are dead. Long live single exposure contacts!
- Henning Haffner
- Martin Ostermayr
- et al.
- 2011
- SPIE Advanced Lithography 2011
Quantitative analysis of parallelism and data movement properties across the Berkeley computational motifs
- Victoria Caparrós Cabezas
- Phillip Stanley-Marbell
- 2011
- CF 2011
Field of view extension using frequency division multiple access technique: Numerical analysis
- Zahra Kavehvash
- Khashayar Mehrany
- et al.
- 2011
- Proceedings of SPIE - The International Society for Optical Engineering 2011
Nd-doped waveguide amplifiers for heterogeneous integration in optical backplanes
- Feridun Ay
- Jing Yang
- et al.
- 2011
- SPIE Photonics West 2011
20 Gbps optical link with high efficiency 1060 nm VCSEL
- Jean Benoit Héroux
- Keishi Takaki
- et al.
- 2011
- SPIE-P-W 2011
300 Gb/s bidirectional fiber-coupled optical transceiver module based on 24 TX + 24 RX "holey" CMOS IC
- Fuad E. Doany
- Clint L. Schow
- et al.
- 2011
- SPIE-P-W 2011
Vapor SIMD: Auto-vectorize once, run everywhere
- Dorit Nuzman
- Sergei Dyshel
- et al.
- 2011
- CGO 2011