Impact of high-NA half-field to full-field overlay performance by Monte Carlo simulations
- Romain Lallement
- Daniel Schmidt
- et al.
- 2023
- OEN 2023
Publications
9082 results for Computer Science
Methodology Development to Benchmark Power Delivery Designs in Advanced Technology Nodes
- Nicholas A. Lanzillo
- A. Chu
- et al.
- 2023
- SPIE Advanced Lithography + Patterning 2023
Overlay Performance in Permanent Bonded Wafer Integration Schemes
- Nathan Ip
- Michael Belyansky
- et al.
- 2023
- SPIE Advanced Lithography + Patterning 2023
EUV sub-resolution assist feature impact: experimental and simulation evaluation
- Zheng Chen
- Martin Burkhardt
- et al.
- 2023
- OEN 2023
The evolution of heterogeneous integration and packaging for the age of chiplets
- Spyridon Skordas
- 2023
- MEMS/NEMS/MOEMS 2023
Adrias: Interference-Aware Memory Orchestration for Disaggregated Cloud Infrastructures
- Dimosthenis Masouros
- Christian Pinto
- et al.
- 2023
- HPCA 2023
SpecFaaS: Accelerating Serverless Applications with Speculative Function Execution
- Jovan Stojkovic
- Tianyin Xu
- et al.
- 2023
- HPCA 2023
Optimized Compiler for Distributed Quantum Computing
- Daniele Cuomo
- Marcello Caleffi
- et al.
- 2023
- ACM TQC
A Quantum Algorithm for the Sub-graph Isomorphism Problem
- Nicola Mariella
- Andrea Simonetto
- 2023
- ACM TQC
MonoNet: Enhancing interpretability in neural networks via monotonic features
- An-Phi Nguyen
- Dana Lea Moreno
- et al.
- 2023
- Bioinformatics Advances