Publications

2357 results at Journal of Applied Physics

Electron spectroscopy study of silicon surfaces exposed to XeF₂ and the chemisorption of SiF₄ on silicon
- - T.J. Chuang
- 2008
- Journal of Applied Physics
Alignment of liquid crystals on obliquely evaporated silicon oxide films
- - David Armitage
- 2008
- Journal of Applied Physics
High current injection into SiO₂ from Si rich SiO₂ films and experimental applications
- - D.J. DiMaria
  - D.W. Dong
- 2008
- Journal of Applied Physics
Optical emission spectroscopy of reactive plasmas: A method for correlating emission intensities to reactive particle density
- - J.W. Coburn
  - M. Chen
- 2008
- Journal of Applied Physics
Shallow junctions by high-dose As implants in Si: Experiments and modeling
- - M.Y. Tsai
  - F.F. Morehead
  - et al.
- 2008
- Journal of Applied Physics
A method for increasing the etch-rate ratio of oxides to nonoxides in inert-gas ion milling processes
- - U. Gerlach-Meyer
  - J.W. Coburn
  - et al.
- 2008
- Journal of Applied Physics
X-ray photoelectron spectroscopy and Auger electron spectroscopy studies of glow discharge Si_1-xC_x:H films
- - Wen-Yaung Lee
- 2008
- Journal of Applied Physics
Parallel silicide contacts
- - I. Ohdomari
  - K.N. Tu
- 2008
- Journal of Applied Physics
The implication of flow-rate dependencies in plasma etching
- - B.N. Chapman
  - T.A. Hansen
  - et al.
- 2008
- Journal of Applied Physics
Dipole layers at the metal-SiO₂ interface
- - T.W. Hickmott
- 2008
- Journal of Applied Physics