Characterization of defects produced in TEOS thin films due to chemical-mechanical polishing (CMP)
- F.B. Kaufman
- S. Cohen
- et al.
- 1995
- MRS Spring Meeting 1995
Publications
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14204 results for Physical Sciences
Polyimide nanofoams for low dielectric applications
- K.R. Carter
- H.J. Cha
- et al.
- 1995
- MRS Spring Meeting 1995
Probing the limits of silicon-based nanoelectronics
- S.J. Wind
- Y. Taur
- et al.
- 1995
- MRS Spring Meeting 1995
Large in-plane lattice expansion in NiAs-MnSb thin films induced by ns laser recrystallization
- Yukiko Kubota
- G. Gorman
- et al.
- 1995
- MRS Spring Meeting 1995
Thermal and mechanical properties of polyimide films
- S.T. Chen
- 1995
- MRS Spring Meeting 1995
Thermal degradation of tantalum-nickel thin film couples
- M.H. Tabacniks
- A.J. Kellock
- et al.
- 1995
- MRS Spring Meeting 1995
Studies of the relationship between megasonics, surface etching, and particle removal in SC-1 solutions
- S.L. Cohen
- D.L. Rath
- et al.
- 1995
- MRS Spring Meeting 1995
Nanosecond structural transformation of magnetic thin films: PtMnSb, structure and magnetic properties
- Yukiko Kubota
- E.E. Marinero
- 1995
- MRS Spring Meeting 1995
VIDS: Visual interpretation for device simulations
- E.J. Farrell
- 1994
- IEDM 1994
Design and performance considerations for sub-0.1 μm double-gate SOI MOSFETs
- H.-S. Wong
- D.J. Frank
- et al.
- 1994
- IEDM 1994