Publications

93 results at MRS Proceedings

Influence of substrate temperature during sputter deposition on the subsequent formation of titanium disilicide
- - A.S. Özean
  - K.F. Ludwig Jr.
  - et al.
- 2002
- MRS Proceedings 2002
Ion projection direct-structuring for nanotechnology applications
- - Hans Loeschner
  - Ernest J. Fantner
  - et al.
- 2002
- MRS Proceedings 2002
Silicon self-interstitial cluster formation and dissolution in SOI
- - A.F. Saavedra
  - J. Frazer
  - et al.
- 2002
- MRS Proceedings 2002
Characterization and monitoring of silicon-on-insulator fabrication processes by high-resolution x-ray diffraction
- - G.M. Cohen
  - P.M. Mooney
  - et al.
- 2002
- MRS Proceedings 2002
A self-aligned silicide process utilizing ion implants for reduced silicon consumption and control of the silicide formation temperature
- - G.M. Cohen
  - C. Cabral Jr.
  - et al.
- 2002
- MRS Proceedings 2002
Cu and dilute binary Cu(Ti), Cu(Sn) and Cu(Al) thin films: Texture, grain growth and resistivity
- - A. Gungor
  - K. Barmak
  - et al.
- 2002
- MRS Proceedings 2002
The growth of tantalum thin films by plasma-enhanced atomic layer deposition and diffusion barrier properties
- - H. Kim
  - C. Cabral Jr.
  - et al.
- 2002
- MRS Proceedings 2002
Texture and resistivity of Cu and dilute Cu alloy films
- - K. Barmak
  - A. Gungor
  - et al.
- 2002
- MRS Proceedings 2002
Characteristics of low-k and ultralow-k PECVD deposited SiCOH films
- - A. Grill
  - V.V. Patel
  - et al.
- 2002
- MRS Proceedings 2002
Pyrene fluorescence as a molecular probe of miscibility in organic/inorganic hybrid nanocomposites suitable for microelectronic applications
- - Q.R. Huang
  - David Mecerreyes
  - et al.
- 2002
- MRS Proceedings 2002