High temperature reactive ion etching of indium-tin oxide with HBr and CH4 mixtures
- Yue Kuo
- T.L. Tai
- 1998
- JES
Publications
509 results at JES
Nonlinear dynamics of limiting current in the flow-modulated uniform-injection cell
- J. Antonio Medina
- Daniel T. Schwarte
- 1997
- JES
Use of SiBN and SiBON films prepared by plasma enhanced chemical vapor deposition from borazine as interconnection dielectrics
- W.F. Kone
- S. Cohen
- et al.
- 1997
- JES
Use of polyaniline and its derivatives in corrosion protection of copper and silver
- Vlasta Brusic
- Marie Angelopoulos
- et al.
- 1997
- JES
High temperature reactive ion etching of indium-tin oxide
- Yue Kuo
- 1997
- JES
Anisotropic etching of a novalak-based polymer at cryogenic temperature
- R. Hsiao
- K. Yu
- et al.
- 1997
- JES
Electromigration drift velocity in Al-alloy and Cu-alloy lines
- C.-K. Hu
- K.Y. Lee
- et al.
- 1996
- JES
Repassivation of pits in aluminum thin films
- G.S. Frankel
- J.R. Scully
- et al.
- 1996
- JES
Etching of tantalum in fluorine-containing high density plasmas
- R. Hsiao
- D.C. Miller
- 1996
- JES
Wettability of polished silicon oxide surfaces
- Richard R. Thomas
- Frank B. Kaufman
- et al.
- 1996
- JES