Surface roughening during titanium silicide formation: A comparison between Si(100) and poly-Si substrates
- C. Lavoie
- R. Martel
- et al.
- 1996
- MRS Fall Meeting 1996
Publications
Date
Featured collections
Popular topics
14204 results for Physical Sciences
Oxygen-induced inhibition of noble metal silicide formation: implications for electrode/barrier structures used with perovskite materials
- K.L. Saenger
- A. Grill
- et al.
- 1997
- MRS Fall Meeting 1997
Recent advances in low K polymeric materials
- K.R. Carter
- 1997
- MRS Spring Meeting 1997
In-plane crystallographic texture of bcc metal thin films on amorphous substrates
- J.M.E. Harper
- K.P. Rodbell
- et al.
- 1997
- MRS Spring Meeting 1997
Effects of wafer cleaning reduction on metals removal and ultrathin gate oxide quality
- C. D'Emic
- S. Cohen
- et al.
- 1997
- MRS Spring Meeting 1997
Effects of arriving atom kinetic energy on the structure and magnetic properties of thin sputter-deposited films
- R.J. Wilson
- T. Minvielle
- et al.
- 1997
- MRS Spring Meeting 1997
Channel profile optimization and device design for low-power high-performance dynamic-threshold MOSFET
- Clement Wann
- Fariborz Assaderaghi
- et al.
- 1996
- IEDM 1996
Monolithic Spiral Inductors Fabricated Using a VLSI Cu-Damascene Interconnect Technology and Low-Loss Substrates
- J.N. Burghartz
- D. Edelstein
- et al.
- 1996
- IEDM 1996
Full Chip Optical Imaging of Logic State Evolution in CMOS Circuits
- J.A. Kash
- J.C. Tsang
- 1996
- IEDM 1996
Manufacturability demonstration of an integrated SiGe HBT technology for the analog and wireless marketplace
- D. Ahlgren
- M.M. Gilbert
- et al.
- 1996
- IEDM 1996