Templating nanopores into poly(methylsilsesquioxane): new low-dielectric coatings suitable for microelectronic applications
- J. Remenar
- C.J. Hawker
- et al.
- 1998
- MRS Spring Meeting 1998
Publications
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14204 results for Physical Sciences
Integration issues for diamond like carbon in a copper damascene process flow
- A. Grill
- C.V. Jahnes
- et al.
- 1998
- MRS Spring Meeting 1998
Dynamic coercivity and thermal decay of magnetic media
- K.A. Rubin
- Jason Goldberg
- et al.
- 1998
- MRS Spring Meeting 1998
Corrosion protection of Cu, Fe, Mn and Co surfaces
- J.E.E. Baglin
- A.J. Kellock
- et al.
- 1998
- MRS Spring Meeting 1998
Extendibility of Cu damascene to 0.1 μm wide interconnections
- C.-K. Hu
- K.Y. Lee
- et al.
- 1998
- MRS Spring Meeting 1998
Experimental and theoretical study of structure-dielectric property relationships for polysilsesquioxanes
- Sung Mog Kim
- D.Y. Yoon
- et al.
- 1998
- MRS Spring Meeting 1998
Stress-corrosion cracking of spin-on glass thin films
- R.F. Cook
- E. Liniger
- 1998
- MRS Spring Meeting 1998
Characterization of spin -on glasses by microindentation
- E. Simonyi
- K.-W. Lee
- et al.
- 1998
- MRS Spring Meeting 1998
Thickness dependent perpendicular magnetic domain patterns in sputtered epitaxial FePt(001) L10 films
- J.-U. Thiele
- L. Folks
- et al.
- 1998
- MRS Spring Meeting 1998
Is selective CVD an improvement for the titanium silicide process in sub-quarter micron technology? A phase formation study using x-ray diffraction
- R.A. Roy
- Cryil Cabral Jr.
- et al.
- 1998
- MRS Spring Meeting 1998