Vacuum systems for microelectronics
- John F. O’hanlon
- 1983
- JVSTA
Paper
Publications
3555 results for Materials Discovery
Summary Abstract: Preparation and properties of granular aluminum in plasma-polymerized matrices
- M. Hecq
- P. Zieman
- et al.
- 1983
- JVSTA
PaperLaser-induced gas-surface interactions
- T.J. Chuang
- 1983
- Surface Science Reports
PaperPlasma etching of niobium with CF4/O2 gases
- Mao-Min Chen
- Run Han Wang
- 1983
- JVSTA
PaperSummary Abstract: Preparation of Pb-Bi film by alloy evaporation II. Microstructure and morphology
- H.-C.W. Huang
- C.M. Serrano
- 1983
- JVSTA
PaperFine-grained base electrode process for Pb-alloy Josephson technology
- A.A. Bright
- S. Klepner
- 1983
- JVSTA
PaperRecent progress in the theory of the electric double layer
- Douglas Henderson
- 1983
- Progress in Surface Science
ReviewA SIMS study of ion-assisted etching mechanisms; adsorbed fluorine on Si removed by ion bombardment
- E.-A. Knabbe
- J.W. Coburn
- et al.
- 1982
- Surface Science
PaperElectronic structure calculations for atomic and diatomic phases of oxygen chemisorbed on Al(111)
- Inder P. Batra
- O. Bisi
- 1982
- Surface Science
PaperLEED structure analysis of A √3 × √3 -30° overlayer of iodine on Ag{111}
- M. Maglietta
- E. Zanazzi
- et al.
- 1982
- Surface Science
Paper