Resolution and Linewidth Tolerances in Electron Beam and Optical Projection Lithography
- Tung Symon Chang
- David F. Kyser
- et al.
- 1981
- IEEE T-ED
Paper
Publications
465 results at IEEE T-ED
I-2 Shallow Silicide Contact for Shallow Junction Devices
- K.N. Tu
- 1981
- IEEE T-ED
PaperRD3D 〈Computer Simulation of Resist Development in Three Dimensions〉
- Fletcher Jones
- Jurij Paraszczak
- 1981
- IEEE T-ED
PaperIVA-7 Surface Layer Impurity Accumulation Due to Evaporation of GaAs During Annealing
- J. Woodall
- H. Rupprecht
- et al.
- 1981
- IEEE T-ED
PaperDual-Electron-Injector-Structure Electrically Alterable Read-Only-Memory Modeling Studies
- D.J. Dimaria
- David W. Dong
- et al.
- 1981
- IEEE T-ED
PaperDeep UV Photoresists I. Meldrum's Diazo Sensitizer
- Barbara D. Grant
- Nicholas J. Clecak
- et al.
- 1981
- IEEE T-ED
PaperReactive lon Etching for VLSI
- Linda M. Ephrath
- 1981
- IEEE T-ED
PaperAging Characteristics of AC Plasma Display Panels
- M.O. Aboelfotoh
- Omesh Sahni
- 1981
- IEEE T-ED
PaperThreshold Voltage Characteristics of Depletion-Mode MOSFET's
- Matthew R. Wordeman
- Robert H. Dennard
- 1981
- IEEE T-ED
PaperPartially Coherent Imaging in Two Dimensions and the Theoretical Limits of Projection Printing in Microfabrication
- Burn Jeng Lin
- 1980
- IEEE T-ED
Paper