High resolution polymer pattern fabrications with Low energy proton beams
- H. Hiraoka
- 1984
- Microlithography 1984
Conference paper
Publications
3602 results for Mathematical Sciences
A 50 to 400 mbit/sec single chip fiber optic receiver circuit
- Dennis L. Rogers
- Albert X. Widmer
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paperElemental and electronic characterization of semiconductor materials with the STEM
- P.E. Batson
- 1989
- Proceedings of SPIE 1989
Conference paperCharacterization of semiconductor silicon by transmission electron microscopy
- Teh Y. Tan
- 1989
- Proceedings of SPIE 1989
Conference paperNuclear profiling of aluminum in GaAlAs/GaAs heterostructures
- A. Bond
- P. Parayanthal
- et al.
- 1983
- Cambridge Symposium 1983
Conference paperOn the possibility of measuring the diffraction pattern of single micro objects
- D. Sayre
- R.P. Haelbich
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paperScanning soft x-ray microscopy with a fresnel zoneplate at the national synchrotron light source
- John M. Kenney
- Janos Kirz
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paperElectron beam fabrication and characterization of fresnel zone plates for soft x-ray microscopy
- D. Kern
- P. Coane
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paperPerformance of multilayer dispersion elements from 80 to 500 ev
- R.J. Bartlett
- D.R. Kania
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paperPossibilities for the study of blood platelets using soft x-ray microscopy
- Mario G. Baldini
- B.K. Kim
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paper