The effect of OPC optical and resist model parameters on the model accuracy, run time, and stability
- Amr Abdo
- Rami Fathy
- et al.
- 2006
- SPIE Photomask Technology 2006
Conference paper
Publications
14468 results for Physical Sciences
Ultra-thin phase-change bridge memory device using GeSb
- Y.C. Chen
- C.T. Rettner
- et al.
- 2006
- IEDM 2006
Conference paperTunable Workfunction for Fully Silicied Gates (FUSI) and Proposed Mechanisms
- Y.-H. Kim
- C. Cabral Jr.
- et al.
- 2006
- VLSI-TSA 2006
Conference paperMastering double exposure process window aware OPC by means of virtual targets
- Henning Haffner
- Zachary Baum
- et al.
- 2006
- SPIE Photomask Technology 2006
Conference paperDirect silicon bonded (DSB) substrate solid phase epitaxy (SPE) integration scheme study for high performance bulk CMOS
- Haizhou Yin
- C.Y. Sung
- et al.
- 2006
- IEDM 2006
Conference paperA 45 nm CMOS node Cu/low-k/ ULtra low-k PECVD SiCOH (k=2.4) BEOL technology
- S. Sankaran
- S. Arai
- et al.
- 2006
- IEDM 2006
Conference paperFundamental power and frequency limits of deeply-scaled CMOS for RF power applications
- Jörg Scholvin
- David R. Greenberg
- et al.
- 2006
- IEDM 2006
Conference paperMillimeter-wave lange and ring-hybrid couplers in a silicon technology for e-band applications
- Mohan K. Chirala
- Brian A. Floyd
- 2006
- IMS 2006
Conference paperNano-CMOS scaling: Novel devices and materials
- Meikei Ieong
- 2006
- NMDC 2006
Conference paperIn situ electron microscopy as a tool for imaging the growth of nanostructures
- S. Kodambaka
- F.M. Ross
- et al.
- 2006
- MRS Fall Meeting 2006
Conference paper