Thermal formation of SiO2 films over NiSi, NiSi2 and CoSi2 via silicide decomposition
- F.M. d'Heurle
- 1983
- Thin Solid Films
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- Materials Discovery
3484 results for Materials Discovery
Ohmic contacts to GaAs
- Norman Braslau
- 1983
- Thin Solid Films
Metallurgical reactions in Au/(InGe) ohmic contacts to GaAs
- C.R.M. Grovenor
- 1983
- Thin Solid Films
Formation and crystallization of amorphous silicides at the interface between thin metal and amorphous silicon films
- S.R. Herd
- K.Y. Ahn
- et al.
- 1983
- Thin Solid Films
Oxidation behavior of PdSi compounds
- A. Cros
- R.A. Pollak
- et al.
- 1983
- Thin Solid Films
ZrN diffusion barrier in aluminum metallization schemes
- L. Krusin-Elbaum
- M. Wittmer
- et al.
- 1983
- Thin Solid Films
Atomic motion of dopant during interfacial silicide formation
- M. Wittmer
- C.-Y. Ting
- et al.
- 1983
- Thin Solid Films
Laser-enhanced selectcive gold plating on microelectronic connector materials
- Robert J. Von Gutfeld
- M.H. Gelghinski
- et al.
- 1983
- CLEO 1983
Laser-induced fluorescence Investigation of glow discharge plasmas
- R.E. Walkup
- R.W. Dreyfus
- et al.
- 1983
- CLEO 1983
Fabrication of high-efficiency surface-relief Holograms
- H.W. Werlich
- Glenn T. Sincerbox
- et al.
- 1983
- CLEO 1983