Chemical Vapor Deposition of Epitaxial Silicon from Silane at Low Temperatures: II. Plasma Enhanced Deposition
- James H. Comfort
- Rafael Reif
- 2019
- JES
Publications
Date
Featured collections
Popular topics
509 results at JES
Refinement of Zinc Silicate Phosphor Synthesis
- I.F. Chong
- J.M. Brownlow
- et al.
- 2019
- JES
On the Temperature Dependence of Majority Carrier Transport in Heavily Arsenic-Doped Polycrystalline Silicon Thin Films
- John D. Cressler
- Wei Hwang
- et al.
- 2019
- JES
MnFe and NiFe Thin Films and Magnetic Exchange Bilayers
- Michael A. Russak
- S.M. Rossnagel
- et al.
- 2019
- JES
Dopant Segregation in CZ and MCZ Silicon Crystal Growth: A Comparison Between Experiment and Numerical Simulation
- K.M. Kim
- W.E. Langlois
- 2019
- JES
Monitoring the Growth of an Oxide Film on Aluminum In Situ with the Quartz Crystal Microbalance
- Owen R. Melroy
- 2019
- JES
Application of Chemical and Electrochemical Micromachining in the Electronics Industry
- Madhav Datta
- Lubomyr T. Romankiw
- 2019
- JES
Etch Selectivity of Silicon Dioxide over Titanium Silicide Using CF4/H2 Reactive Ion Etching
- Steve W. Robey
- Gottlieb S. Oehrlein
- 2019
- JES
Design principles of bipolar electrochemical co-electrolysis cells for efficient reduction of carbon dioxide from gas phase at low temperature
- Alexandra Patru
- Tobias Binninger
- et al.
- 2019
- JES
Differential inhibition during Cu electrodeposition on Ru: Combined electrochemical and real-time TEM studies
- P. M. Vereecken
- Alex Radisic
- et al.
- 2018
- JES