Publications

101 results at Proceedings of SPIE - The International Society for Optical Engineering

Fabrication of dual damascene BEOL structures using a multi-level multiple exposure (MLME) scheme - Part 2. RIE-based pattern transfer and completion of dual damascene process yielding an electrically functional via chain
- - Stefan Harrer
  - John C Arnold
  - et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
A silicon-containing resist for immersion lithography
- - Ratnam Sooriyakumaran
  - Wu-Song Huang
  - et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
Process characterization of pitch-split resist materials for application at 16nm node
- - Steven J. Holmes
  - Cherry Tang
  - et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
Lasing from defect states in mixed-order organic laser structures
- - K. Baumann
  - Gabriele Raino
  - et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
The effect of photoresist/topcoat properties on defect formation in immersion lithography
- - G.M. Wallraff
  - Carl E. Larson
  - et al.
- 2007
- Proceedings of SPIE 2007
The role of copper-phthalocyanine in multilayer organic LEDs based on small molecules
- - Heike Riel
  - Tilman A. Beierlein
  - et al.
- 2002
- Proceedings of SPIE 2002
Technology and design of an active matrix OLED on crystalline silicon direct view display for a wrist watch computer
- - James L. Sanford
  - Eugene S. Schlig
  - et al.
- 2002
- Proceedings of SPIE - The International Society for Optical Engineering
New shape representation and similarity measure for efficient shape indexing
- - Konstantin Y. Kupeev
  - Zohar Sivan
- 2002
- Proceedings of SPIE - The International Society for Optical Engineering
Comparison of sequence matching techniques for video copy detection
- - Arun Hampapur
  - Ki-Ho Hyun
  - et al.
- 2002
- Proceedings of SPIE - The International Society for Optical Engineering
High NA lithographic imagery at Brewster's angle
- - Timothy A. Brunner
  - Nakgeuon Seong
  - et al.
- 2002
- Proceedings of SPIE - The International Society for Optical Engineering