Physical and chemical mechanisms in the ion-enhanced etching of silicon
- JW Coburn
- 1984
- Vacuum
Paper
Publications
27 results at Vacuum
A semi-classical description of excitation in sputtering and in electron-atom collisions
- Roger Kelly
- 1983
- Vacuum
PaperLaser probes of molecule-surface dynamics
- A.C. Luntz
- A.W. Kleyn
- et al.
- 1983
- Vacuum
PaperComment on 'An experimental study of the thermal dissociation of hydrogen molecules at a heated filament at low pressure
- T.W. Hickmott
- 1979
- Vacuum
Paper2.22 The deposition by evaporation of CuAl alloy films
- F.M. d'Heurle
- C. Alliota
- et al.
- 1977
- Vacuum
PaperGas phase oxidation of silicon monoxide during formation of evaporated films
- P. White
- 1962
- Vacuum
PaperMechanical stresses in silicon oxide films
- J.R. Priest
- H.L. Caswell
- et al.
- 1962
- Vacuum
Paper