1X deep UV lithography with chemical amplification for 1-micron DRAM production
- John G. Maltabcs
- Steven J. Holmes
- et al.
- 1990
- Microlithography 1990
Conference paper
Publications
3602 results for Mathematical Sciences
Negative tone aqueous developable resist for photon electron and X-ray lithography
- Willard Conley
- Wayne Moreau
- et al.
- 1990
- Microlithography 1990
Conference paperSilylation of poly (t-BOC) styrene resists: Performance and mechanisms
- C.A. Spence
- S.A. Macdonald
- et al.
- 1990
- Microlithography 1990
Conference paperModified polyhydroxystyrenes as matrix resins for dissolution inhibition type photoresists
- G. Pawlowski
- T.P. Sauer
- et al.
- 1990
- Microlithography 1990
Conference paperA unification of Liouvillian extensions
- Manuel Bronstein
- 1990
- Applicable Algebra in Engineering, Communication and Computing
PaperSmallest scale estimates for the Navier-Stokes equations for incompressible fluids
- W.D. Henshaw
- H.O. Kreiss
- et al.
- 1990
- Archive for Rational Mechanics and Analysis
PaperDynamic detection of subgraphs in computer networks
- Israel Cidon
- Inder S. Gopal
- 1990
- Algorithmica
PaperRapid adaptive segmentation by estimation and reassignment of uncertainty pixels
- Arturo A. Rodriguez
- O.R. Mitchell
- 1989
- Proceedings of SPIE 1989
Conference paperThe role of perception in a theory of communication
- Leora Morgenstern
- 1989
- Proceedings of SPIE 1989
Conference paperMinimalist Light Striping for a Mobile Robot
- Jonathan Connell
- 1989
- Proceedings of SPIE 1989
Conference paper