High-rate reactive sputter deposition of zirconium dioxide
- Fletcher Jones
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Publications
358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary Abstract: Analysis of Co-doped iron oxide thin films by grazing incidence x-ray diffraction
- Michael F. Toney
- Ting C. Huang
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperThe change in Si-AI bonding with metal coverage at the Si(111)^3 xV3-AI interface
- J.S. Nelson
- Inder P. Batra
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperProperties of hard tungsten films prepared by sputtering
- K.K. Shih
- D.A. Smith
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperLocal structure investigation of the ion sputtered oxide substrates
- Y.S. Chaug
- Y.H. Kim
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperAtomic structure and bonding of Si(111)-(V3 x v 3)AI
- R.J. Hamers
- J.E. Demuth
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperTheory of the local tunneling spectrum of a vibrating adsorbate
- A. Baratoff
- B.N.J. Persson
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperMechanisms of contaminant particle production, migration, and adhesion
- R.J. Miller
- Douglas W. Cooper
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperPthalimide on copper: A model system to address certain site-specific interactions at the polyimide-copper interface
- W.R. Salaneck
- S. Stafstrom
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperMetal-polymer chemistry. I. Charge-transfer-related modifications of polyimide (pyromellitic dianhydride-4,4'-oxydianiline)
- J.G. Clabes
- M.J. Goldberg
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper